Nta ntawm kev txheeb xyuas lub tshuab hluav taws xob hauv tshuab hluav taws xob
Txawm hais tias kev thaij duab hluav taws xob hauv tshuab hluav taws xob yog lub hnub qub nce hauv tsev neeg tsom iav, nws tau tsim kho sai heev vim nws muaj ntau qhov txiaj ntsig zoo.
1 Qhov ntsuas tau muaj qhov kev daws teeb meem siab, thiab cov duab hluav taws xob theem nrab yuav siv tau los soj ntsuam cov ntsiab lus ntawm cov qauv saum npoo ntawm thaj tsam li 6nm. Siv cov phom LaB6 hluav taws xob, nws tuaj yeem txhim kho ntxiv rau 3nm.
2 Cov ntau ntawm qhov ntsuas ntawm lub ntsuas yog loj thiab tuaj yeem hloov kho tsis tu ncua. Yog li, koj tuaj yeem xaiv ntau qhov sib txawv ntawm qhov chaw saib kom pom raws li koj cov kev xav tau. Nyob rau tib lub sijhawm, koj tuaj yeem txais lub siab-siab meej cov duab pom uas nyuaj rau kev ua tiav nrog cov hluav taws xob zoo tib yam hauv tshuab hluav taws xob ntawm lub tshuab kom loj dua.
3 Saib qhov tob ntawm daim teb ntawm tus qauv, thaj teb ntawm pom loj heev, thiab cov duab yog tag nrho ntawm peb qhov kev txiav txim zoo. Nws tuaj yeem ncaj qha mus saib qhov chaw ntxhib nrog kev hloov loj thiab cov hlau tsis sib luag ntawm tus qauv, thiab lwm yam, muab cov tib neeg lub siab xav nyob hauv lub ntiaj teb micro.
4 Cov qauv npaj tau yooj yim, ntev npaum li lub block lossis hmoov tus qauv tau kho lossis tsis kho me ntsis, nws tuaj yeem pom ncaj qha rau hauv kev thaij duab hluav taws xob tsom, yog li nws tau ze rau lub xeev xwm txheej ntawm cov tshuaj yeeb dej caw.
5Qhov duab zoo tuaj yeem tswj tau thiab txhim kho los ntawm kev siv hluav taws xob, xws li tsis siv neeg tu lub ci ci thiab sib piv, qauv qaij lub kaum kev txhim kho, kev hloov duab, lossis lub latitude ntawm kev txhim kho cov duab sib txawv los ntawm Y kev hloov kho, thiab lub ci ci ntawm txhua feem ntawm daim duab Ntsawv. Siv cov khoom siv ob lub tshuab hluav taws xob lossis cov duab xaiv, cov duab nrog txawv tsom tau tuaj yeem pom ib txhij hauv lub vijtsam fluorescent.
6 Kev soj ntsuam zoo muaj peev xwm ua tau. Nruab nrog lub koob thaij duab hluav taws xob xaim hluav taws xob (XD ray), lossis hluav taws xob-hluav taws xob xoo hluav taws xob (EDX), nws muaj qhov ua haujlwm ntawm kev soj ntsuam hluav taws xob thiab tseem tuaj yeem tshawb nrhiav cov hluav taws xob, xoo hluav taws xob, cathode fluorescence, kis tau hluav taws xob , thiab Auger Electronics, thiab lwm yam Kev nthuav dav daim ntawv thov ntawm kev thaij duab hluav taws xob tsom rau ntau yam microscopic thiab micro-cheeb tsam tsom kev qhia tau hais tias lub versatility ntawm scanning electron microscopy. Ntxiv rau, nws tseem muaj peev xwm los soj ntsuam qhov kev xaiv micro-thaj chaw ntawm tus qauv thaum soj ntsuam cov duab morphological; nrog rau kev ua ke ntawm cov qauv ntim semiconductor nrog, kev sib tshuam PN thiab kev tsis sib haum xeeb me me hauv qhov transistor lossis kev sib txuas ua ke tuaj yeem pom ncaj qha los ntawm electromotive quab yuam duab amplifier. Txij li ntau SEM hluav taws xob xaj hluav taws xob paub txog lub koos pij tawj hluav taws xob tsis siv neeg thiab kev tswj hwm ib nrab, qhov ceev ntawm qhov kev txiav txim siab yog ntau heev.