Cov yam ntxwv ntawm tshuaj vapor deposition
Kuv) Muaj ntau hom kev tso nyiaj: cov hlau zaj duab xis, cov yeeb yaj kiab tsis yog hlau yuav muaj peev xwm muab tso rau, thiab cov yeeb yaj kiab tiv thaiv ntau cov yeeb yaj kiab kuj tseem tuaj yeem npaj tau raws li qhov xav tau, ntxiv rau cov nplais lossis cov txheej txheem sib xyaw.
2) CVD cov tshuaj tiv thaiv yog nqa tawm ntawm lub nrawm lossis nqus plua plav, thiab txheej muaj cov khoom zoo sib txawv. Nws tuaj yeem ncaj ncaj rau phaj qhov sib sib zog nqus thiab qhov zoo ntawm qhov saum npoo nrog cov qauv duab lossis cov haujlwm ua haujlwm.
3) Cov txheej txheem nyias tha xim nrog lub siab purity, zoo compactness, tsis tshua muaj kev ntxhov siab, thiab zoo crystallization tuaj yeem tau txais. Vim tias qhov sib txawv ntawm cov pa roj tawm ntawm cov tshuaj tiv thaiv, cov tshuaj tiv thaiv cov khoom siv thiab cov substrate, ib zaj duab xis nrog zoo adhesion tuaj yeem tau, uas yog qhov tseem ceeb heev rau kev txhim kho cov yeeb yaj kiab xws li nto passivation, corrosion resistance thiab hnav tsis kam.
4) Vim tias qhov kub ntawm daim nyias zaj duab xis kev loj hlob yog qis dua qhov chaw melting ntawm cov khoom siv zaj duab xis, txheej txheej ntawm zaj duab xis nrog cov siab huv thiab ua tiav crystallization tuaj yeem tau, uas yog tsim nyog rau qee txheej txheej ua yeeb yaj kiab.
5) Los ntawm kev kho lub thau tawm tsis pub tsawg, cov tshuaj lom neeg muaj pes tsawg leeg, morphology, cov qauv siv lead ua thiab cov nplai loj ntawm cov xim tuaj yeem tswj tau zoo.
6) Cov khoom siv yog yooj yim thiab yooj yim rau kev khiav lag luam thiab tswj.
7) Cov tshuaj tiv thaiv kub dhau heev, feem ntau ntawm 850 ~ 1100 ° C. Muaj ntau cov ntaub ntawv pov tseg tsis tuaj yeem tiv taus qhov kub siab ntawm CVD. Kev siv ntshav lossis lub tshuab laser pabcuam tuaj yeem txo qhov kev tso cua txias.