Tshuaj vapor deposition txheej txheem
Cov txheej txheem tshuaj vapor tso tawm tau faib ua peb theem tseem ceeb: qhov tshuaj tiv thaiv cov pa roj mus rau sab saum npoo ntawm qhov chaw tso, cov pa roj tawm ntawm cov nplaim hluav taws xob, cov tshuaj tiv thaiv cov pa tshuaj tiv thaiv tau tshwm sim nyob rau saum npoo ntawm lub substrate los ua ib qho khoom tso, thiab cov roj theem by-products detach los ntawm substrate nto. Feem ntau cov tshuaj lom neeg vapor deposition tshua yog: thermal decomposition tshua, tshuaj lom neeg cov tshuaj tiv thaiv, thiab kev thauj khoom hauv tshuaj lom neeg. Feem ntau TiC lossis TiN tau tso nyiaj los ntawm kev qhia TiCl4, H2, CH4 thiab lwm yam gases mus rau hauv cov tshuaj tiv thaiv chav tsev ntawm 850 ~ 1100 ℃, thiab tsim cov txheej txheej rau saum npoo ntawm cov substrate los ntawm cov tshuaj lom neeg.