Cov xyaw ntawm wafer yog silicon. Lub silicon yog qhov ua kom huv los ntawm quartz xuab zeb. Tus wafer yog lim los ntawm silicon keeb (99.999%). Tom qab ntawd lub ntshiab silicon yog tsim rau hauv silicon ingots, uas dhau los ua quartz semiconductor rau kev tsim ua ke ib ncig. Cov khoom siv, slicing nws yog qhov wafer tshwj xeeb xav tau rau nti ntau lawm. Lub thinner lub wafer, qis dua tus nqi tsim, tab sis cov txheej txheem siab dua.
Wafer txheej
Wafer txheej zaj duab xis tuaj yeem tiv taus oxidation thiab kub tsis kam, thiab nws cov khoom yog ib hom photoresist.
Wafer photolithography kev txhim kho, etching
Qhov pib ntws ntawm cov txheej txheem photolithography. Thawj zaug yog lo rau txheej ntawm photoresist nyob rau saum npoo ntawm wafer (lossis duab hauv qab) thiab qhuav nws. Lub tshuab wafer qhuav tau pauv mus rau lub tshuab lithography. Lub teeb kis tau los ntawm daim npog qhov ncauj thiab ua cov qauv ntawm lub npog ntsej muag mus rau tus kws yees duab sab hauv wafer kom tiav kev sib kis thiab txhawb kev thaij duab. Qhov cub thib ob yog ua rau ntawm cov hmoov ci cawv, uas yog qhov sib kis ntawm lub ncuav ci. Tom qab kev ci yog qhov ua tiav ntau ntawm photochemical. Thaum kawg, cov neeg tsim khoom raug txau mus rau cov txheej txheem photoresist ntawm wafer nto kom tsim kho cov qauv sib txawv. Tom qab kev txhim kho, tus qauv ntawm daim npog ntsej muag yog sab laug ntawm tus kws yees duab. Cov kua nplaum lo, ci, thiab kev loj hlob yog ua tiav txhua yam hauv kev tsim homogenizing, thiab kev nthuav tawm tau ua hauv lub tshuab thaij duab. Cov kua nplaum tsim tawm thiab tshuab lithography feem ntau ua haujlwm online, thiab wafers yog thauj ntawm cov khoom thiab tshuab los ntawm neeg hlau. Tag nrho cov kev nthuav tawm thiab kev txhim kho kaw, thiab lub wafer tsis raug ncaj qha rau cov chaw ib puag ncig los txo cov kev cuam tshuam ntawm cov teeb meem hauv cheeb tsam ib puag ncig ntawm photoresist thiab photochemical tshua.